Sustainable Development Goals
Abstract/Objectives
Taiwan is an important wafer foundry center in the world, and the automation equipment in the dust free room workshop is an indispensable device. At present, many equipments are still imported foreign machines for assembly. Not only is the cost high, but it is not easy to make fine adjustments according to needs. This topic is to cooperate with Taiwanese industry manufacturers to develop firmware programs and apply them to clean room automation equipment. We integrate the skills of mathematical analysis into the algorithm to achieve high precision and real-time calculation.
Results/Contributions
According to the feedback from the manufacturers, the products we developed are not far behind the European and American manufacturers in terms of performance and accuracy, and the cost is much lower, laying the foundation for Taiwan to develop its own automated machines.
Keywords
waferautomated equipmentmathematical analysisalgorithm
Contact Information
朱家杰
ccchu@math.nthu.edu.tw